Nanopositioning Piezo Flexure Stages

PI's piezo flexure stages combine sub-nanometer resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for applications in metrology, for super resolution microscopy, for interferometry or in inspection systems for semiconductor chip production. Piezo flexure stages are available for millisecond-settling precision positioning and dynamic scanning with up to several 100 Hertz in up to 6 degrees of freedom.

The unique combination of proprietary sensor design, frictionless flexure guides and long-life PICMA® piezo actuators makes for excellent and robust mechanics. Piezo motion controllers support positioning and scanning performance optimization, and are easily integrated over digital or analog interfaces and comfortable programming.