Multi-Axis Piezo Flexure Stages

Multi-Axis Piezo Flexure Stages

PI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axes, including tip, tilt and yaw motion. Versions range from most compact cube design to large aperture and low profile.

XYZ Scanners are all-rounders in positioning technology. Applications include sample adjustment, technology, optical metrology, fiber positioning and photonics, as well as atomic force microscopy.

All piezo nanopositioning systems are factory-calibrated and delivered with measurement log. 

XYZ Compact Piezo Cubes

P-616 NanoCube® Nanopositioner

Compact Parallel-Kinematic Nanopositioner for Fiber Alignment and Scanning Microscopy

P-611.3 NanoCube® XYZ Nanopositioner

Compact Multi-Axis Piezo Positioner for Nanopositioning and Fiber Alignment

XYZ Piezo Stages with Aperture

P-733.3 XYZ Piezo Nanopositioner

High-Precision XYZ Scanner with Aperture

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

P-517 • P-527 Multi-Axis Piezo Scanner

High Dynamics Nanopositioner / Scanner with Direct Position Measuring

Z / Tip / Tilt Piezo Flexure Stages

P-518 • P-528 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

6- Axis Piezo Stages

P-562.6CD PIMars 6-Axis Nanopositioning Stage

High-Precision Nanopositioner with 6 Degrees of Freedom