Linear Piezo Flexure Stages

Linear Piezo Flexure Stages

PI’s  nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.

Linear piezo stages with PICMA® piezo actuator drive and flexure guidings are available for travel ranges up to 1.5 mm.

Piezo Flexure Linear Stages

P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration

P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

P-753 LISA Linear Actuator and Positioning Stage

Dynamic and Stable in Position

P-752 High-Precision Nanopositioning Stage

Highly Dynamic and Stable Piezo Scanner with Extremely Accurate Guiding

P-750 Piezo Nanopositioner

High-Load Piezo-Driven Nanopositioner with Direct Position Measuring

P-733.Z High Dynamics Z Nanopositioning Stage

Direct Position Measuring and Clear Aperture

P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

P-611.1 Linear Piezo Positioner

Inexpensive, Compact Linear Stage

P-620.1 • P-629.1 PIHera Linear Precision Positioner

Variable Travel Ranges and Axis Configuration

Piezo Flexure Vertical Stages

P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

P-733.Z High Dynamics Z Nanopositioning Stage

Direct Position Measuring and Clear Aperture

P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

P-611.Z Piezo Z Stage

Compact Nanopositioner