Air Bearings & Stages

Air Bearings & Stages

Air bearing stages are used where vibration-free motion is required, velocity needs to be highly constant, and optimum angular repeatability is requested.

Air bearings avoid friction, wear, and backlash effects. PIglide linear, rotary and spherical bearings are precision components that can be integrated and motorized for applications in OEM, industrial, and research markets.  

Linear Stages with Air Bearings

NEW

A-143 PIglide Miniature Linear Air Bearing Stage

High Performance • Cleanroom-Compatible • Option for Vertical Mounting

A-142 PIglide Voice Coil Linear Stage with Air Bearings

High Performance • Cleanroom-Compatible • Option for Vertical Mounting
  • High performance
  • Possible vertical mounting
  • Motion platform 75mm × 80mm
  • Travel ranges up to 10mm
  • Acceleration up to 20 m/s

A-131 PIglide VC Voice Coil Linear Stage with Air Bearings

High-Performance Miniature Nanopositioning System
  • Miniature nanopositioning system
  • Clean room compatible
  • Travel ranges up to 25mm
  • Load capacity up to 30N
  • Acceleration up to 40m/s

A-110 PIglide LC Linear Stage with Air Bearings

Inexpensive High Performance Nanopositioning Stage
  • High precision positioning
  • Inexpensive & clean room compatible
  • Motion platform 160mm × 200mm
  • Travel ranges up to 400mm
  • Load capacity up to 100N

A-141 PIglide MB Miniature Linear Stage with Air Bearings

High Performance, Cleanroom Compatible, Customizable
  • High performance
  • Clean room compatible
  • Motion platform 57mm × 93mm
  • Travel ranges up to 35mm
  • Acceleration up to 3,5m/s

A-123 PIglide AT3 Linear Stage with Air Bearings

High Performance Nanopositioning Stage
  • High performance nanopositioning stage
  • Clean room compatible
  • Motion platform 210mm × 210mm
  • Travel ranges 50mm to 750mm
  • Resolution up to 1 nm

A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage
  • High performance nanopositioning stage
  • small design
  • Motion platform 115mm × 115mm
  • Travel ranges up to 350mm
  • Resolution up to 1nm

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XY Stages with Air Bearings

A-351 MGS Gantry System with Linear Motors

Robust Compact Design with Recirculating Ball Bearing Guides for High Load Capacity.

A-341 PIglide HGS Hybrid Gantry System

Hybrid Guide Design with Air Bearings and Recirculating Ball Bearing Guides for High Precision with Low Profile.

A-322 PIglide HS Planar Scanner with Air Bearing

XY Positioning System with 1 nm Resolution
  • XY air bearing stage, planar, high performance, travel to 1 m, linear motors, absolute encoder, nanometer precision. For high accuracy automation & metrology.

A-311 PIglide IS Planar Scanner with Air Bearing

High-Performance, Compact XY Nanopositioning System
  • Compact XY-nanopositioning system
  • High-precision positioning
  • Low profile
  • Travel ranges up to 300mm × 400mm
  • Load capacity up to 147N

Rotation and Tip/Tilt Stages with Air Bearings

A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings

High Performance • Cleanroom-Compatible • Low Profile
  • High performance
  • Low profile
  • Travel range in Z up to ±2.5 mm
  • Rotation range in θX, θY up to ±1°
  • Load capacity up to 8 kg

A-68x PIglide Rotation Stage with Air Bearing

Large Aperture, Friction Free, Motorized
  • Friction-free, motorized
  • ⌀365mm motion platform
  • ⌀260 mm aperture
  • Eccentricity/flatness &lt
  • 300nm

A-63x PIglide RL Flat Rotation Stage with Air Bearing

Friction-free, Motorized
  • Friction-free, motorized
  • Low profile
  • Eccentricity/flatness &lt
  • 100nm
  • Self-locking option

A-62x PIglide RM Rotation Stage with Air Bearings

Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology
  • Friction-Free
  • Motion platform 50mm to 300mm
  • Load capacity up to 4170N
  • Eccentricity/flatness &lt
  • 200nm
  • mounted vertically or horizontally

PIglide Motion Controllers

NEW

A-811.CE PIglide Motion Controller for One Axis

For Stages with Direct Drive, TCP/IP Interface
  • Motion controller for motor stages with air bearings. High end for industrial precision automation - linear and rotary motion.

A-82x PIglide Motion Controller for 4, 6 or 8 Axes

For Stages with Direct Drive and High Power Requirements, TCP/IP Interface
  • High power motion controller for linear motor stages with air bearings. High end for industrial precision automation - linear and rotary motion.

A-81x PIglide Motion Controller for 1, 2 or 4 Axes

For Stages with Direct Drive, TCP/IP Interface
  • Direct Drive, TCP/IP Interface
  • 1, 2, & 4 motion axes
  • Quiet PWM drives
  • Output 10A continuous/20A peak/axis

Air Bearings

PIglide RT Rotary Air Bearing Module

A-60x PIglide RT Rotary Air Bearing Module

Frictionless, Nonmotorized
  • Frictionless, non-motorized
  • Motion platform 50mm to 300mm
  • High load capacity up to 425kg
  • Eccentricity/flatness <200nm
  • mounted vertically or horizontally
PIglide RB Linear Air Bearing Module

A-10x PIglide RB Linear Air Bearing Module

Friction Free, Ideal for Positioning, Scanning, Metrology
  • High-resolution positioning
  • Friction-free & clean room compatible
  • Motion platform 300mm × 300mm
  • Load capacity 775kg
  • Travel ranges up to 1m

A-65x PIglide HB: Hemispherical Air Bearing Module

Friction-Free, Ideal for Rotational Motion on Three Axes
  • Ideal for Rotational Motion
  • Rotatable in three directions
  • Low inertia
  • Load capacity up to 635kg
  • tip/tilt range to ±45°

Accessories

Mounting Feet

A-10x.MNT Mounting Feet

For Mounting the Air Bearing Modules of the A-10x Series
Pedestal

A-65x.PED Pedestal

Compatible with A-65x PIglide HB Hemispherical Air Bearing Module
  • Compatible with A-65x PIglide HB
  • Matching pedestal
PIglide Manual XY Tip/Tilt Platform

A-60x.MTT PIglide Manual XY Tip/Tilt Platform

Compatible with A-60x and A-62x
  • Add-On For Rotary Stage
  • 4 degrees of freedom
  • Travel range to ±3mm, ±1.25°
  • Direct mount on A-60x / A-62x
  • Manual operation
PIglide Filter and Air Preparation Kits

A-80x PIglide Filter and Air Preparation Kits

Accessories for Air Bearings and Air Bearing Stages
  • Accessories
  • controls supply pressure
  • available with multiple channels
  • available with storage tank
  • available with vacuum generation

Technology

PIglide Air Bearing Technology

PIglide Air Bearing Technology

Magnetic Direct Drives

Magnetic Direct Drives