Product Series with Vacuum-Ready Items

Product Series with Vacuum-Ready Items

PI offers specific catalogue items for selected product series that are already suitable for high vacuum (HV) or ultra-high vacuum (UHV).

Furthermore, most of the PI axes and multi-axis solutions can be modified on request for use in vacuum. You can find more information on PI‘s Design-for-Vacuum on the >> Vacuum technology page.

Hexapods

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg
  • Vaccum Version
  • Range ±50 / ±50 / ±25 mm
  • Rotation range ±15 / ±15 / ±30°

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
  • Vacuum version
  • Range ±17 / ±16 / ±6.5 mm
  • Rotation range ±10 / ±10 / ±21°
  • MiM 0.2 / 0.2 / 0.08 µm
  • Load capacity 5 kg

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise
  • Vacuum version
  • Range ± 22.5 / ±22.5 / ±12.5 mm
  • Rotation range ±7.5 / ±7.5 / ±12.5°
  • Load capacity 5 kg

Linear, Rotation, Elevation Stages and Accessories

RS-40 V7 Compact Rotation Stage Suitable for Vacuum

Precision Positioning

M-110 • M-111 • M-112 V6 Vacuum-Compatible Compact Linear Stage

XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants

VT-80 V6 Linear Stage Suitable for Vacuum

Basic Version for Universal Fields of Use

L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum

High Travel Accuracy

L-509 V6 • V7 • V9 Vacuum-Compatible Precision Linear Stage

Compact Design, for Loads to 10 kg

L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages
PI L-500

L-500 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
Adapter Bracket
NEW

AB-65 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
VFxx Vacuum Feedthroughs

C-815.VFxx Vacuum Feedthroughs

Interfaces Between Air Side and High Vacuum (HV) or Ultrahigh Vacuum (UHV)
NEW

P-891.VA • P-892.VA Vacuum Feedthrough

Accessories for Vacuum-Compatible Piezo Positioners

L-220 V6 High-Resolution Linear Actuator Suitable for Vacuum

Suitable for High Cycle Numbers

Piezo Actuators and Stages

P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration

P-841 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces, with Position Sensor

P-733.3 XYZ Piezo Nanopositioner

High-Precision XYZ Scanner with Aperture

P-733.2 XY Piezo Nanopositioner

High-Precision XY Scanner with Aperture

P-216 PICA Power Piezo Actuators

Preloaded Piezo Actuators (HVPZT) with Sensor Option
  • Travel range to 180µm
  • Push force to 4500N
  • Pull force to 500N
  • Subnanometer resolution
  • For vacuum/ high temperature

P-845 Preloaded Piezo Actuators

For Very High Loads and Forces, with Position Sensor

P-844 Preloaded Piezo Actuators

For Very High Loads and Forces

P-840 Preloaded Piezo Actuators

Compact Actuators for High Loads and Forces

P-753 LISA Linear Actuator and Positioning Stage

Dynamic and Stable in Position

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioner for up to 3 Axes

P-518 • P-528 Piezo Z/Tip/Tilt Stage

High Dynamics with Large Aperture

P-235 PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • High Force
  • Travel range 180µm
  • Extremely high stiffness
  • Push force to 30000N
  • Pull force to 3500N

N-480 High-Precision Kinematic Mirror Mount

With N-470 PiezoMike Linear Actuators

N-470.V PiezoMike Linear Actuator

Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10-6 hPa

Sensors

D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors
  • Highest precision
  • Resolution to 0.01nm
  • Linearity error to 0,01%
  • Measuring range to 300µm