S-325 Piezo Z/Tip/Tilt Platform
High Dynamics Tripod System for Mirrors and Optics
- Optical beam deflection to 10 mrad
- Resolution to 50 nrad
- Linear travel ranges to 30 µm (for runtime adjustment)
- Compact tripod design
- Sub-ms response time
- Closed-loop versions for increased precision
- For mirrors up to Ø 25 mm (1")
- Zero-play, high-precision flexure guide system
- Parallel kinematics for higher accuracy and dynamics
Application fields
- Image processing / stabilization
- Optical trapping
- Laser scanning / beam steering
- Laser tuning
- Optical filters / switches
- Optics
- Beam stabilization
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
S-325.30L | S-325.3SL | S-325.3SD | Unit | Tolerance | |
---|---|---|---|---|---|
Active axes | Z, θX, θY | Z, θX, θY | Z, θX, θY | ||
Motion and positioning | |||||
Integrated sensor | – | SGS | SGS | ||
Travel range in Z at 0 to 100 V, open loop | 30 | 30 | 30 | µm | +20 % / -0 % |
Tip/tilt angle at 0 to 100 V, open loop | 5 | 5 | 5 | mrad | +20 % / -0 % |
Travel range in Z, closed loop | – | 30 | 30 | µm | |
Tip / tilt angle in θX, θY, closed loop | – | 4 | 4 | mrad | |
Resolution in Z, open loop | 0.5 | 0.5 | 0.5 | nm | typ. |
Resolution in θX, θY, open loop | 0.05 | 0.05 | 0.05 | µrad | typ. |
Resolution in Z, closed loop | – | 0.6 | 0.6 | nm | typ. |
Closed-loop resolution in θX, θY | – | 0.1 | 0.1 | µrad | typ. |
Mechanical properties | |||||
Resonant frequency in Z, no load | 2 | 2 | 2 | kHz | ±20 % |
Resonant frequency, under load (with 25 mm × 8 mm glass mirror) | 1 | 1 | 1 | kHz | ±20 % |
Distance of pivot point to platform surface | 6 | 6 | 6 | mm | ±0.5 mm |
Platform moment of inertia | 515 | 515 | 515 | g × mm² | ±20 % |
Drive properties | |||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 3 × 3.1 | 3 × 3.1 | 3 × 3.1 | µF | ±20 % |
Miscellaneous | |||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | °C | |
Housing material | Aluminum | Aluminum | Aluminum | ||
Mass | 0.065 | 0.065 | 0.065 | kg | ±5 % |
Cable length | 2 | 2 | 2 | m | +100 mm / -0 mm |
Sensor / voltage connection | LEMO | LEMO | D-sub 25 (m) | ||
Recommended electronics | E-610, E-616, E-663, E-727 | E-610, E-616, E-663, E-727 | E-610, E-616, E-663, E-727 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
3-D Models
S-325 3-D model
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Technology
PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
Piezo Positioning Systems with Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.