Achieving Long Travel Ranges in a Compact Footprint

XY Piezo Stages for Stable Motion and Exceptional Precision

In need of ultra-precise motion and long travel ranges where every nanometer counts? PIHera XY stages combine long travel ranges with exceptional resolution—all within a compact, flexure-guided design.

  • High dynamics for maximum productivity at high frequencies
  • Superior precision and long-term stability with backlash-free flexure guides
  • Fast delivery of popular models for urgent project needs​

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Need to Know More Before Requesting a Quote?

  • Looking for ultra-precise motion?
    With subnanometer resolution and high-frequency bandwidth, PIHera’s capacitive sensors guarantee outstanding linearity, long-term stability, and optimum precision for the most demanding applications.
  • Maximum stability is a priority?
    PIHera piezo stages feature ultra-stiff, backlash-free flexure guides that ensure high guiding accuracy, wear resistance, and insensitivity to shock and vibration.
  • Require responsive control?
    Direct position measurement ensures optimal repeatability, superior stability, and precise control, perfect for high-speed, high-precision tasks.
  • Seeking exceptional durability?
    PIHera piezo stages utilize PICMA® piezo actuators, which are all-ceramic insulated to protect against humidity and failures caused by leakage current. Their advanced design provides up to ten times the life of conventional polymer-insulated actuators, with a proven 100 billion cycles without failure for maximum reliability.
  • Need fast delivery?
    With exceptionally short lead times, the selected PIHera XY piezo stages P-628.2CD, P-625.2CD, P-622.2CD, and P-621.2CD are quickly available to meet your needs without delay. A high-performance controller (E-727.3CDA or E-709.1C1L) is included in the scope of delivery to ensure seamless integration and optimal performance.

Get a 3D Model for Precise Assembly and Construction

  • Check compatibility: Space requirements and travel ranges can be checked
  • Virtual measurements: Specifications can be checked in advance

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Check Out the Technical Details of PIHera XY Piezo Stages

  • Specification tables
  • Technical drawings and images
  • Available variants

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FAQs

PIHera piezo stages offer an impressive resolution down to 0.1 nm and a positioning precision of 0.02 %. Their high resolution, exceptional subnanometer precision, outstanding reliability, long-term stability, and fast response times make them ideal for demanding applications.

The selected PIHera piezo stages offer travel ranges from 120 µm to 1000 µm, while the overall spectrum of PIHera piezo stages covers travel ranges from 50 µm to 1800 µm, providing versatile options for a wide range of applications.

The PIHera piezo stages are designed to withstand various environmental challenges, including vibration and temperature fluctuations, making them suitable for semiconductor, photonics, biotechnology, quality assurance, and other applications.

PIHera piezo stages are ideal for high-precision applications, where ultra-precise positioning and fine resolution are essential, like fiber positioning, test procedures, interferometry, or microscopy.

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The Selected PIHera Piezo Stage Is Not the Right Fit?

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