V-572 Z Vertical Ultra-Precision Direct Drive Linear Nanopositioning Stage

Product overview

V-572.Z vertical translation stages are high-precision Z-stages designed for accuracy, long service life, and reliable operation in demanding automation and positioning applications. Thanks to a user-adjustable magnetic counterbalance, these vertical lift stages are optimized for vertical orientation, minimizing motor current while improving dynamic performance and efficiency.

Despite their compact footprint, V-572 nanopositioning Z-stages deliver exceptional travel accuracy, straightness, and flatness, outperforming many larger motorized lift stages. A powerful, non-cogging direct-drive linear motor ensures smooth motion and high repeatability, making the V-572 family well suited for continuous operation in production environments.

The absolute encoder option provides 1 nm resolution and enables safe, efficient startup without homing or initialization. Ultra-precision cross-roller bearings ensure high stiffness and low maintenance over the lifetime of the vertical translation stage.

The V-572 family of positioning stages also includes linear stages for horizontal mounting with travel ranges of up to 100 mm. These stages can be combined to form XY and XYZ positioning systems for precision motion applications. All V-572 stages are compatible with PI’s standard A-8xx control electronics.

3-phase motors for higher dynamics and friction-free, maintenance-free operation

The 3-phase linear motors driving the V-572 stage family transfer their force directly and friction-free to the motion platform. This eliminates backlash and play that can result from mechanical components like gears and screws in the drivetrain. Ideal for high-velocity, high-acceleration applications, these motors feature a maintenance-free, frictionless design, ensuring longevity in demanding 24/7 operations. The controller's current limit settings allow easy motor disablement, preventing damage to the stage or the application.

Crossed roller bearings improve load capacity, accuracy and lifetime

Crossed roller bearings offer a superior level of smoothness, straightness, and flatness, close to air bearing performance. By replacing the point contact of ball bearings with a line contact, rollers become considerably stiffer, requiring less preload. This reduction in friction enables smoother running, lower noise and higher accuracy. Crossed roller bearings can also support higher vertical and moment loads. The anti-creep mechanism prevents roller drift, enhancing reliability. Cleanroom grease is applied for low-maintenance operation.

Incremental and absolute encoder options

V-572 stages are equipped with linear encoders that measure position with utmost accuracy directly at the motion platform, enhancing linearity and ensuring immunity to mechanical play and elastic deformation which can result from indirect position feedback methods. Incremental encoders, relying on 1 Vpp sine/cosine signals, require a home signal to initiate. In contrast, absolute feedback linear encoders offer explicit position information, enabling immediate determination of the absolute position. This eliminates the need for referencing during power-on, enhancing both efficiency and safety during operation.

Choosing the right precision linear stage and motion controller

Selecting the right linear stage is crucial for optimal performance in high-precision motion applications, such as semiconductor inspection, laser microprocessing, metrology, and alignment. Factors such as resolution, guiding accuracy, and repeatability must be carefully considered. The V-572 linear stage family provides exceptional trajectory accuracy (flatness, straightness, pitch, and yaw) along with ±80 nanometers bi-directional repeatability. With high dynamic properties, featuring 1 g acceleration and 500 mm/s velocity, these fast and accurate motorized stages are ideal for automation of highly accurate positioning tasks required for the mass production of precision devices.

Configured with PI’s A-8xx series motion controllers, these stages achieve unparalleled motion performance. PI’s EtherCAT-based controllers offer remarkable flexibility, facilitating the seamless integration of third-party equipment compatible with EtherCAT. Advanced algorithms in the A-8xx series motion controllers, such as PILOT, allow for higher dynamics with reduced motor currents, virtually increasing the motor’s force constant. Choose the V-572 for precision, reliability, and efficiency in your motion applications.

Accessories and options

• Encoder type – 1 V_pp sin/cos or absolute BiSS output
• Single or multi-axis, ACS motion controllers and servo drives, integrated or distributed
• Cables compatible with the A-8xx series, ACS-powered controllers
• Multi-axis XY- and XYZ-stage assemblies
• Granite support base

Application fields

Sample inspection. Precision micro-assembly. Research. Biotechnology. Semiconductor test and inspection. Metrology. General automation. Device assembly. Laser micro-processing. Pick and place. Alignment of optics, micromechanics and photonics components.