Achieve Subnanometer Resolution with High-Speed XYZ Positioning
Piezo Nanopositioning Stages for Next-Gen Scanning, Alignment, and Metrology
Increase productivity with up to 300 µm travel and <10 ms step-and-settle times
Ensure unmatched accuracy with 99.97% linearity and 2 nm repeatability
Accelerate project success with fast delivery of selected models
PIMars XYZ piezo stages push the limits of precision in scanning, alignment, and metrology. They combine subnanometer resolution with high stiffness and dynamic response, delivering the accuracy and speed required for next-generation research and manufacturing.
Aysenur Ünal, PI Product Manager, Piezo Systems and Actuators
Six Key Benefits of Nanopositioning Stages for Precision Applications
- Ultra precise motion—easy to integrate: Providing subnanometer resolution, 99.97% linearity, and long-term stability with capacitive sensors. Excellent scanning flatness (±30 nm straightness and flatness in Z-motion) and a compact footprint ensure accurate planar movement and easy integration, even in space-constrained setups.
- Versatile optical access: Clear aperture supports transmitted light and beam alignment tasks, enabling flexible use in photonics and microscopy applications.
- Maximum stability: Zero-play flexure guides deliver wear-free, frictionless motion with high stiffness, ensuring robustness against shock, vibration, and temperature changes.
- High dynamics: Piezoelectric drives with parallel position measurement enable real-time crosstalk compensation and nanometer-level tracking accuracy in high-speed applications, helping increase yield, improve quality control, and reduce costs across research and industry.
- Exceptional durability: Fully insulated PICMA® piezo actuators last up to ten times longer than conventional actuators and have proven reliability beyond 100 billion cycles.
- Fast availability: Models P-561, P-562, and P-563 are available for immediate shipment, ensuring exceptionally short lead times.
Get a 3D Model for Precise Assembly and Construction
Get a 3D Model for Precise Assembly and Construction
- Check compatibility: Space requirements and travel ranges can be checked
- Virtual measurements: Specifications can be checked in advance
Check Out the Technical Details for Three-Axis Piezo Nanopositioners
Check Out the Technical Details for Three-Axis Piezo Nanopositioners
- Specification tables
- Technical drawings and images
- Available variants
Our XYZ nanopositioning stages are ideal for applications that require the highest precision, such as:
- Microscopy & Life Sciences: Super-resolution, confocal, and AFM imaging, Z-stacking, live-cell studies, and bio-nanotechnology. Excellent scanning flatness ensures sharp 3D images.
- Nanotechnology: Precise manipulation and assembly of nanostructures for research and industrial applications.
- Photonics & Optics: Fiber and optical alignment, interferometry, and precision optics adjustment. The central aperture supports transmitted light or beam alignment tasks.
- Semiconductor & Metrology: Wafer inspection, lithography, mask alignment, and defect detection where nanometer precision and high dynamics are essential.
Yes. Polymer- and lubricant-free design ensures low outgassing, making them ideal for high and ultrahigh vacuum down to 10⁻⁹ hPa. PIMars stages are available with up to six axes for complex multidimensional positioning, as well as vacuum- and cryo-compatible versions, with lead times provided on request
Not the Right Fit? Explore More Nanopositioning Stage Options
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